【Experiment】Plasma Clean
23 November 2016
Procedure
- 打开电源,login(账号:admin 密码 admin)
- Init之后变绿
- 开仓,放样品
- Process 选程序 - Program Start 大概清洗速率为10min~10nm
- 关机:1. Start - Shut down machine 2. Exit - Exit program and Windows 3. 关闭机械开关
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